EUV Illumination
Excimer Laser Optics
DUV Projection Lens
Optical systems for EUV and DUV demand state of the art performance.  With this requirement comes state of the art fabrication techniques and ultra-precision tolerances.

Hyperion works very closely with our strategic partners to insure that our DUV and EUV optics are able to meet our customers needs.  We work closely with the final manufacturer and develop sophisticated compensation schemes to allow the performance targets to be met.

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