UV SOLUTIONS
EUV Illumination
Excimer Laser Optics
DUV Projection Lens
 
 
 
 
 
 
Hyperion excels at optical design for both DUV and EUV applications.  We have an extensive knowledge base and understand the requirements from the illuminator all the way to the resist.  Our staff is considered world experts in the design of optical systems for semiconductor process, semiconductor metrology, and semiconductor process applications.

DUV Design
High Dry Scanner Lenses
Immersion Scanner Lenses
Inspection Optics
Process Optics

EUV Design
Projection Systems
Illumination Systems
Metrology Systems


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