EUV Illumination
Excimer Laser Optics
DUV Projection Lens
DUV and EUV optics require as level of sophisticated analysis not found in any other optical system.  Hyperion has been involved in the most advanced DUV and EUV applications for almost two decades.  We are recognized world experts in this field.

Tolerance and Fabrication Adjust Predictions
Stray Light Analysis
Prolith Simulations

Hyperion is one of the few companies to offer ProLith simulations as part of our optical analysis of semiconductor lithography optics.  You won’t find this level of vertically integrated experience in any other consulting firm.

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