EUV Illumination
Excimer Laser Optics
DUV Projection Lens
DUV Projection Lens

Hyperion recently completed the design and fabrication of an advanced DUV projection lens for 308 nm laser projection.

80m field (largest field ever for a UV laser source)
Native resolution of 3.0 mm L/S over this 80mm field
Resolution of 2.5 mm L/S using enhanced illumination