EUV Illumination
Excimer Laser Optics
DUV Projection Lens
Excimer Laser Optics

Hyperion has developed numerous beam delivery systems for industrial Excimer laser applications.  Our illumination designs have used fly eye arrays and other specialty components to provide uniform illumination at the mask plane.  We also design reduction lenses and match them to our illuminators.

Beam homogenization using fly eye lens arrays
End to end beam delivery simulations
Lens design for excimer laser reduction lenses
Beam delivery optics - industrial & semiconductor