EUV Illumination
Excimer Laser Optics
DUV Projection Lens
A core competency of Hyperion is the development of Deep Ultraviolet (DUV) and Extreme Ultraviolet (EUV) imaging systems for lithographic printing and semiconductor process metrology.  Companies like Intel, Zeiss, Cymer, Nanometrics, and Corning have trusted Hyperion to provide advanced design, analysis, and modeling to support the current and next generation of advanced semiconductor lithography and metrology.

Our patent portfolio is filled with innovative examples in the DUV and EUV and our full spectrum solutions can take you from design through production.